Term Mass flow controller
Definition A mass flow controller (MFC) is a device used to measure and control the flow of liquids and gases. A mass flow controller is designed and calibrated to control a specific type of liquid or gas at a particular range of flow rates.
Provenance NFDI4Cat
Provenance uri https://w3id.org/nfdi4cat/voc4cat_0000164
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Status ACCEPTED i